A Microfluidic-integrated Biosensing Soc for Cardiac Troponin I Detection in 0.35μm Cmos Process
نویسندگان
چکیده
A monolithically integrated micro-fluidic biosensor system-on-chip (μBio-SSoC) is first realized in standard CMOS processes. This μBio-SSoC is composed of a CMOS-based microfluidic pump, a polysilicon nanowire (SiNW) biosensor, and driving circuits. With 1.5V driving voltage, the microfluidic pump drives sample-liquids to biosensing area with 34 μm/s flowing velocity. After pumping, the detection limit of the integrated biosensor is verified at 320fM for cardiac troponin I (cTnI) protein. This μBio-SSoC successfully demonstrates the high-sensitivity CMOS-based biosensor equipped with microfluidic handling ability. This technique shows a potential of the various CMOS-based biosensors with microfluidic pump as biodiagnosis SoC for personalized healthcare systems.
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